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    materials are discussed. Unfortu-nately, all refractory metals oxidize in air above 250 oC (480 F) so their uses are limited to vacuum or inert atmos-phere applications. Nevertheless, tungsten elements can be used up to 2800oC (5070oF) in vacuum. Reactions with ceramic insulating materials are discussed, and methods for the con-Get Price

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    2009-1-1 · HFCVD has been used for the deposition of polycrystalline diamond on large areas. The feasibility of manufacturing amorphous silicon, microcrystalline silicon, and silicon nitride has been demonstrated. HWCVD may be an important step on the way to cost effective solar cell production. Download : Download full-size image; Fig. 31.

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